E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) Revision:SEMI E46-0307 - Inactive SEMI F98-0521 (technical revision)

SEMI F98-0521 (technical revision)

PVD and Plating)

This procedure involves measurement of total Cr/Fe ratios

VPDで収集される。

SEMI MF391-0310E (editorial revision)

E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) Revision:SEMI E46-0307 - Inactive SEMI F98-0521 (technical revision)NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Test Method is to provide an analytical procedureion mobility spectrometry (IMS)for the determination of organic contamination from minienvironments which has the capability of testing their