M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 StdPbc-0522 including jigs and some consumable

including jigs and some consumable materials

本仕様は，Global Gases Committeeで技術的に承認されたもので，North American Gases Committeeが直接責任を負うものである。現版は2004年4月22日North American Regional Standards Committeeにて承認されている。2004年6月にまずwww

SEMI E140-0312 (technical revision)

The developmental wafers covered by this specification are intended for use in research and development of process and metrology equipment and fabrication processes required for manufacturing high-density integrated circuits on 450 mm diameter single crystal silicon wafers

This Guide is intended for use in the exchange of silicon wafers and is not intended for process development where a wider range of options and data reporting formats may be appropriate

M05600 - SEMI M56 - 計量装置の測定変動と偏りに起因する費用成分の作業法 StdPbc-0522 including jigs and some consumableglobal Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM200311 11 P TP T Referenced SEMI Standards SEMI E35 Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment SEMI E89 Guide for Measurement System Analysis (MSA) SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers S EMI M59 Terminology for Silicon Technology