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SEMI M12-88 (first published)
storage or a combination of both transport and storage as perceived by a SEMI Equipment Communications Standard 2 (SECS-II) host that complies with the GEM model (as specified in § 11)
SEMI G52-90 (Reapproved 1104)
and for determining the temperature of the specimen during the measurement are also given
This Specification defines the materials and acceptance criteria for the components (bases
P04600 - SEMI P46 - Specification for Critical Dimension (CD) Measurement Information Data on Photomask by XML Revision:SEMI P46-0706 - Superseded SEMI M12-88 (first published)This Standard was technically approved by the Micropatterning Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in November 2011; originally published July 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards
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