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org in June 2015
or VPD/Inductively Coupled Plasma-Mass Spectrometry (VPD/ICP-MS)
The testing method proposed in this standard includes dynamic CBU and static CBU
帯電したウェーハやレチクルの表面は異物を吸着（静電気吸着，またはESA： electrostatic attraction）し，不良率を増やす。また，製品に存在する電荷は，装置故障や製品自体の破壊の原因となることがある。
inspection criteria
F05100 - SEMI F51 - Guide for Elastometric Sealing Technology Revision:SEMI F51-0200 - Superseded org in June 2015This Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 28, 2017. Available at www. semiviews. org and www. semi. org in September 2017; originally published February 2000; previously published November 2015. O rings were originally developed for industrial markets and much later for aerospace. Current industry standards do not
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