M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers Revision:SEMI M15-0298 - Inactive For instance

For instance

and p-type

This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19

2  This Specification defines the behavior associated with the execution of data collection plans in the form of finite state machines

which is determined by the amount of moisture taken up by the component and subsequently released in any exposure after receipt during its operation independently or as part of a gas delivery system

M01500 - SEMI M15 - Polished Wafer Defect Limits Table for Semi-Insulating Gallium Arsenide Wafers Revision:SEMI M15-0298 - Inactive For instanceThis document defines the maximum number of defects, by type, that an acceptable polished Semi Insulating Gallium Arsenide (GaAs) wafer may exhibit. Referenced SEMI Standards None.