G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 SEMI MF673¾ Test Method for

SEMI MF673¾ Test Method for Measuring Resistivity of Semiconductor Wafers or Sheet Resistance of Semiconductor Films with a Noncontact Eddy Current Gauge

and SEMI C12

This Specification defines the properties of silicon epitaxial wafers with buried layers that relate to the characteristics of photolithography

• Extension of recipe identification capability

SEMI E70-1213 (Reapproved 1021)

G08100 - SEMI G81 - Specification for Map Data Items StdPbc-0815 SEMI MF673¾ Test Method forThis Document describes the data items that relate to electronic substrate mapping. This Document applies only to substrate map data items. This Document does not address the transmission, file naming conventions, storage or archiving of substrate maps. The Specification of which data items are optional and which are required is not specified in this Document. The size of each data item described in this Document is maximum size. The actual size may